Перегляд Citep 2014 по Автору "Shimanovich, D."
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Study of internal stresses in aluminum layers evaporated on dielectric surfaces
Shimanovich, D. (Видавництво НГУ, 2014)Analysis of internal stresses in evaporated aluminum layers formed at various sputtering regimes is demonstrated. Dependences of internal stresses on the thickness of aluminum films deposited at vario ...